11/6/2011	12:04:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	12:04:23 AM	Recipe started at 12:04 AM
11/6/2011	12:04:23 AM	Helium valve closed
11/6/2011	12:04:23 AM	H2 valve closed
11/6/2011	12:04:23 AM	BCl3 valve closed
11/6/2011	12:04:23 AM	PH3 valve closed
11/6/2011	12:04:23 AM	SiCl4 pre valve closed
11/6/2011	12:04:23 AM	SiCl4 post valve closed
11/6/2011	12:04:23 AM	Main Vac valve closed
11/6/2011	12:04:23 AM	Bubbler valve closed
11/6/2011	12:04:23 AM	Bypass valve opened
11/6/2011	12:04:23 AM	Helium MFC set to  0.000000
11/6/2011	12:04:23 AM	H2 MFC set to  0.000000
11/6/2011	12:04:23 AM	BCl3 MFC set to  0.000000
11/6/2011	12:04:23 AM	PHl3 MFC set to  0.000000
11/6/2011	12:04:23 AM	SiCl4 MFC set to  0.000000
11/6/2011	12:04:23 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:04:24 AM	Tube furnace set to 0
11/6/2011	12:05:30 AM	Helium valve closed
11/6/2011	12:05:30 AM	H2 valve closed
11/6/2011	12:05:30 AM	BCl3 valve closed
11/6/2011	12:05:30 AM	PH3 valve closed
11/6/2011	12:05:30 AM	SiCl4 pre valve closed
11/6/2011	12:05:30 AM	SiCl4 post valve closed
11/6/2011	12:05:30 AM	Main Vac valve closed
11/6/2011	12:05:30 AM	Bubbler valve closed
11/6/2011	12:05:30 AM	Bypass valve opened
11/6/2011	12:05:30 AM	Helium MFC set to  0.000000
11/6/2011	12:05:30 AM	H2 MFC set to  0.000000
11/6/2011	12:05:30 AM	BCl3 MFC set to  0.000000
11/6/2011	12:05:30 AM	PHl3 MFC set to  0.000000
11/6/2011	12:05:30 AM	SiCl4 MFC set to  0.000000
11/6/2011	12:05:30 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:05:30 AM	Tube furnace set to 0
11/6/2011	12:06:30 AM	Helium valve closed
11/6/2011	12:06:30 AM	H2 valve closed
11/6/2011	12:06:30 AM	BCl3 valve closed
11/6/2011	12:06:30 AM	PH3 valve closed
11/6/2011	12:06:30 AM	SiCl4 pre valve closed
11/6/2011	12:06:30 AM	SiCl4 post valve closed
11/6/2011	12:06:30 AM	Bypass valve closed
11/6/2011	12:06:30 AM	Bubbler valve closed
11/6/2011	12:06:30 AM	Main Vac valve opened
11/6/2011	12:06:30 AM	Helium MFC set to  0.000000
11/6/2011	12:06:30 AM	H2 MFC set to  0.000000
11/6/2011	12:06:30 AM	BCl3 MFC set to  0.000000
11/6/2011	12:06:30 AM	PHl3 MFC set to  0.000000
11/6/2011	12:06:30 AM	SiCl4 MFC set to  0.000000
11/6/2011	12:06:30 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:06:30 AM	Tube furnace set to 0
11/6/2011	12:06:31 AM	Run finished at 12:06 AM
11/6/2011	12:06:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	8:31:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	8:31:21 AM	Recipe started at 8:31 AM
11/6/2011	8:31:21 AM	Helium valve closed
11/6/2011	8:31:21 AM	H2 valve closed
11/6/2011	8:31:21 AM	BCl3 valve closed
11/6/2011	8:31:21 AM	PH3 valve closed
11/6/2011	8:31:21 AM	SiCl4 pre valve closed
11/6/2011	8:31:21 AM	SiCl4 post valve closed
11/6/2011	8:31:21 AM	Main Vac valve closed
11/6/2011	8:31:21 AM	Bypass valve closed
11/6/2011	8:31:21 AM	Bubbler valve closed
11/6/2011	8:31:21 AM	Helium MFC set to  0.000000
11/6/2011	8:31:21 AM	H2 MFC set to  0.000000
11/6/2011	8:31:21 AM	BCl3 MFC set to  0.000000
11/6/2011	8:31:21 AM	PHl3 MFC set to  0.000000
11/6/2011	8:31:21 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:31:21 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:31:21 AM	Tube furnace set to 0
11/6/2011	8:31:24 AM	H2 valve closed
11/6/2011	8:31:24 AM	BCl3 valve closed
11/6/2011	8:31:24 AM	PH3 valve closed
11/6/2011	8:31:24 AM	SiCl4 pre valve closed
11/6/2011	8:31:24 AM	SiCl4 post valve closed
11/6/2011	8:31:24 AM	Main Vac valve closed
11/6/2011	8:31:24 AM	Bypass valve closed
11/6/2011	8:31:24 AM	Bubbler valve closed
11/6/2011	8:31:24 AM	Helium valve opened
11/6/2011	8:31:24 AM	Helium MFC set to  500.000000
11/6/2011	8:31:24 AM	H2 MFC set to  0.000000
11/6/2011	8:31:24 AM	BCl3 MFC set to  0.000000
11/6/2011	8:31:24 AM	PHl3 MFC set to  0.000000
11/6/2011	8:31:24 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:31:24 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:31:24 AM	Tube furnace set to 0
11/6/2011	8:32:30 AM	Helium valve closed
11/6/2011	8:32:30 AM	H2 valve closed
11/6/2011	8:32:30 AM	BCl3 valve closed
11/6/2011	8:32:30 AM	PH3 valve closed
11/6/2011	8:32:30 AM	SiCl4 pre valve closed
11/6/2011	8:32:30 AM	SiCl4 post valve closed
11/6/2011	8:32:30 AM	Main Vac valve closed
11/6/2011	8:32:30 AM	Bypass valve closed
11/6/2011	8:32:30 AM	Bubbler valve closed
11/6/2011	8:32:30 AM	Helium MFC set to  0.000000
11/6/2011	8:32:30 AM	H2 MFC set to  0.000000
11/6/2011	8:32:30 AM	BCl3 MFC set to  0.000000
11/6/2011	8:32:30 AM	PHl3 MFC set to  0.000000
11/6/2011	8:32:30 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:32:30 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:32:30 AM	Tube furnace set to 0
11/6/2011	8:32:31 AM	Run finished at 8:32 AM
11/6/2011	8:32:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	8:34:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	8:34:36 AM	Recipe started at 8:34 AM
11/6/2011	8:34:36 AM	Helium valve closed
11/6/2011	8:34:36 AM	H2 valve closed
11/6/2011	8:34:36 AM	BCl3 valve closed
11/6/2011	8:34:36 AM	PH3 valve closed
11/6/2011	8:34:36 AM	SiCl4 pre valve closed
11/6/2011	8:34:36 AM	SiCl4 post valve closed
11/6/2011	8:34:36 AM	Main Vac valve closed
11/6/2011	8:34:36 AM	Bubbler valve closed
11/6/2011	8:34:36 AM	Bypass valve opened
11/6/2011	8:34:36 AM	Helium MFC set to  0.000000
11/6/2011	8:34:36 AM	H2 MFC set to  0.000000
11/6/2011	8:34:36 AM	BCl3 MFC set to  0.000000
11/6/2011	8:34:36 AM	PHl3 MFC set to  0.000000
11/6/2011	8:34:36 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:34:36 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:34:36 AM	Tube furnace set to 0
11/6/2011	8:34:58 AM	Run aborted at 8:34 AM
11/6/2011	8:34:58 AM	Helium valve closed
11/6/2011	8:34:58 AM	H2 valve closed
11/6/2011	8:34:58 AM	BCl3 valve closed
11/6/2011	8:34:58 AM	PH3 valve closed
11/6/2011	8:34:58 AM	SiCl4 pre valve closed
11/6/2011	8:34:58 AM	SiCl4 post valve closed
11/6/2011	8:34:58 AM	Bypass valve closed
11/6/2011	8:34:58 AM	Main Vac valve closed
11/6/2011	8:34:58 AM	Bubbler valve closed
11/6/2011	8:34:58 AM	Helium MFC set to  0.000000
11/6/2011	8:34:58 AM	H2 MFC set to  0.000000
11/6/2011	8:34:58 AM	BCl3 MFC set to  0.000000
11/6/2011	8:34:58 AM	PHl3 MFC set to  0.000000
11/6/2011	8:34:58 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:34:58 AM	Tube furnace set to 0
11/6/2011	8:34:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	8:35:28 AM	Bypass valve opened
11/6/2011	8:35:54 AM	Bypass valve closed
11/6/2011	8:37:12 AM	Bypass valve opened
11/6/2011	8:37:45 AM	Tube furnace set to 100
11/6/2011	8:51:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	8:51:29 AM	Recipe started at 8:51 AM
11/6/2011	8:51:29 AM	Helium valve closed
11/6/2011	8:51:29 AM	H2 valve closed
11/6/2011	8:51:29 AM	BCl3 valve closed
11/6/2011	8:51:29 AM	PH3 valve closed
11/6/2011	8:51:29 AM	SiCl4 pre valve closed
11/6/2011	8:51:29 AM	SiCl4 post valve closed
11/6/2011	8:51:29 AM	Main Vac valve closed
11/6/2011	8:51:29 AM	Bypass valve closed
11/6/2011	8:51:29 AM	Bubbler valve closed
11/6/2011	8:51:29 AM	Helium MFC set to  0.000000
11/6/2011	8:51:29 AM	H2 MFC set to  0.000000
11/6/2011	8:51:29 AM	BCl3 MFC set to  0.000000
11/6/2011	8:51:29 AM	PHl3 MFC set to  0.000000
11/6/2011	8:51:29 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:51:29 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:51:29 AM	Tube furnace set to 0
11/6/2011	8:51:32 AM	H2 valve closed
11/6/2011	8:51:32 AM	BCl3 valve closed
11/6/2011	8:51:32 AM	PH3 valve closed
11/6/2011	8:51:32 AM	SiCl4 pre valve closed
11/6/2011	8:51:32 AM	SiCl4 post valve closed
11/6/2011	8:51:32 AM	Main Vac valve closed
11/6/2011	8:51:32 AM	Bypass valve closed
11/6/2011	8:51:32 AM	Bubbler valve closed
11/6/2011	8:51:32 AM	Helium valve opened
11/6/2011	8:51:33 AM	Helium MFC set to  500.000000
11/6/2011	8:51:33 AM	H2 MFC set to  0.000000
11/6/2011	8:51:33 AM	BCl3 MFC set to  0.000000
11/6/2011	8:51:33 AM	PHl3 MFC set to  0.000000
11/6/2011	8:51:33 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:51:33 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:51:33 AM	Tube furnace set to 0
11/6/2011	8:52:36 AM	Helium valve closed
11/6/2011	8:52:36 AM	H2 valve closed
11/6/2011	8:52:36 AM	BCl3 valve closed
11/6/2011	8:52:36 AM	PH3 valve closed
11/6/2011	8:52:36 AM	SiCl4 pre valve closed
11/6/2011	8:52:36 AM	SiCl4 post valve closed
11/6/2011	8:52:36 AM	Main Vac valve closed
11/6/2011	8:52:36 AM	Bypass valve closed
11/6/2011	8:52:36 AM	Bubbler valve closed
11/6/2011	8:52:36 AM	Helium MFC set to  0.000000
11/6/2011	8:52:36 AM	H2 MFC set to  0.000000
11/6/2011	8:52:36 AM	BCl3 MFC set to  0.000000
11/6/2011	8:52:36 AM	PHl3 MFC set to  0.000000
11/6/2011	8:52:36 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:52:36 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:52:36 AM	Tube furnace set to 0
11/6/2011	8:52:37 AM	Run finished at 8:52 AM
11/6/2011	8:52:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	8:56:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	8:56:36 AM	Recipe started at 8:56 AM
11/6/2011	8:56:36 AM	Helium valve closed
11/6/2011	8:56:36 AM	H2 valve closed
11/6/2011	8:56:36 AM	BCl3 valve closed
11/6/2011	8:56:36 AM	PH3 valve closed
11/6/2011	8:56:36 AM	SiCl4 pre valve closed
11/6/2011	8:56:36 AM	SiCl4 post valve closed
11/6/2011	8:56:36 AM	Main Vac valve closed
11/6/2011	8:56:36 AM	Bubbler valve closed
11/6/2011	8:56:36 AM	Bypass valve opened
11/6/2011	8:56:36 AM	Helium MFC set to  0.000000
11/6/2011	8:56:36 AM	H2 MFC set to  0.000000
11/6/2011	8:56:36 AM	BCl3 MFC set to  0.000000
11/6/2011	8:56:36 AM	PHl3 MFC set to  0.000000
11/6/2011	8:56:36 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:56:36 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:56:36 AM	Tube furnace set to 0
11/6/2011	8:57:44 AM	Helium valve closed
11/6/2011	8:57:44 AM	H2 valve closed
11/6/2011	8:57:44 AM	BCl3 valve closed
11/6/2011	8:57:44 AM	PH3 valve closed
11/6/2011	8:57:44 AM	SiCl4 pre valve closed
11/6/2011	8:57:44 AM	SiCl4 post valve closed
11/6/2011	8:57:44 AM	Main Vac valve closed
11/6/2011	8:57:44 AM	Bubbler valve closed
11/6/2011	8:57:44 AM	Bypass valve opened
11/6/2011	8:57:44 AM	Helium MFC set to  0.000000
11/6/2011	8:57:44 AM	H2 MFC set to  0.000000
11/6/2011	8:57:44 AM	BCl3 MFC set to  0.000000
11/6/2011	8:57:44 AM	PHl3 MFC set to  0.000000
11/6/2011	8:57:44 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:57:44 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:57:44 AM	Tube furnace set to 0
11/6/2011	8:58:44 AM	Helium valve closed
11/6/2011	8:58:44 AM	H2 valve closed
11/6/2011	8:58:44 AM	BCl3 valve closed
11/6/2011	8:58:44 AM	PH3 valve closed
11/6/2011	8:58:44 AM	SiCl4 pre valve closed
11/6/2011	8:58:44 AM	SiCl4 post valve closed
11/6/2011	8:58:44 AM	Bypass valve closed
11/6/2011	8:58:44 AM	Bubbler valve closed
11/6/2011	8:58:44 AM	Main Vac valve opened
11/6/2011	8:58:44 AM	Helium MFC set to  0.000000
11/6/2011	8:58:44 AM	H2 MFC set to  0.000000
11/6/2011	8:58:44 AM	BCl3 MFC set to  0.000000
11/6/2011	8:58:44 AM	PHl3 MFC set to  0.000000
11/6/2011	8:58:44 AM	SiCl4 MFC set to  0.000000
11/6/2011	8:58:44 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:58:44 AM	Tube furnace set to 0
11/6/2011	8:58:45 AM	Run finished at 8:58 AM
11/6/2011	8:58:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	9:02:01 AM	Helium MFC set to  20.000000
11/6/2011	9:02:02 AM	Helium valve opened
11/6/2011	9:03:37 AM	Helium valve closed
11/6/2011	9:06:07 AM	Helium valve opened
11/6/2011	9:08:28 AM	Helium valve closed
11/6/2011	9:10:10 AM	Helium valve opened
11/6/2011	9:10:15 AM	Tube furnace set to 50
11/6/2011	9:11:15 AM	Helium valve closed
11/6/2011	9:14:22 AM	Main Vac valve closed
11/6/2011	9:14:35 AM	Main Vac valve opened
11/6/2011	9:15:47 AM	Helium valve opened
11/6/2011	9:15:47 AM	Helium valve closed
11/6/2011	9:15:47 AM	Helium valve opened
11/6/2011	9:17:22 AM	Helium valve closed
11/6/2011	9:19:11 AM	Main Vac valve closed
11/6/2011	9:19:28 AM	Main Vac valve opened
11/6/2011	9:19:37 AM	Helium valve opened
11/6/2011	9:21:53 AM	Helium valve closed
11/6/2011	9:21:57 AM	Helium MFC set to  0.000000
11/6/2011	9:23:11 AM	Main Vac valve closed
11/6/2011	9:23:36 AM	Main Vac valve opened
11/6/2011	9:24:15 AM	Helium MFC set to  20.000000
11/6/2011	9:24:17 AM	Helium valve opened
11/6/2011	9:25:35 AM	Helium valve closed
11/6/2011	9:25:38 AM	Helium MFC set to  0.000000
11/6/2011	9:28:16 AM	Recipe started at 9:28 AM
11/6/2011	9:28:16 AM	Helium valve closed
11/6/2011	9:28:16 AM	H2 valve closed
11/6/2011	9:28:16 AM	BCl3 valve closed
11/6/2011	9:28:16 AM	PH3 valve closed
11/6/2011	9:28:16 AM	SiCl4 pre valve closed
11/6/2011	9:28:16 AM	SiCl4 post valve closed
11/6/2011	9:28:16 AM	Main Vac valve closed
11/6/2011	9:28:16 AM	Bypass valve closed
11/6/2011	9:28:16 AM	Bubbler valve closed
11/6/2011	9:28:16 AM	Helium MFC set to  0.000000
11/6/2011	9:28:16 AM	H2 MFC set to  0.000000
11/6/2011	9:28:16 AM	BCl3 MFC set to  0.000000
11/6/2011	9:28:16 AM	PHl3 MFC set to  0.000000
11/6/2011	9:28:16 AM	SiCl4 MFC set to  0.000000
11/6/2011	9:28:16 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:28:16 AM	Tube furnace set to 0
11/6/2011	9:28:19 AM	Helium valve closed
11/6/2011	9:28:19 AM	BCl3 valve closed
11/6/2011	9:28:19 AM	PH3 valve closed
11/6/2011	9:28:19 AM	SiCl4 pre valve closed
11/6/2011	9:28:19 AM	SiCl4 post valve closed
11/6/2011	9:28:19 AM	Main Vac valve closed
11/6/2011	9:28:19 AM	Bypass valve closed
11/6/2011	9:28:19 AM	Bubbler valve closed
11/6/2011	9:28:19 AM	H2 valve opened
11/6/2011	9:28:19 AM	Helium MFC set to  0.000000
11/6/2011	9:28:19 AM	H2 MFC set to  500.000000
11/6/2011	9:28:19 AM	BCl3 MFC set to  0.000000
11/6/2011	9:28:19 AM	PHl3 MFC set to  0.000000
11/6/2011	9:28:19 AM	SiCl4 MFC set to  0.000000
11/6/2011	9:28:19 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:28:19 AM	Tube furnace set to 100
11/6/2011	9:29:25 AM	Helium valve closed
11/6/2011	9:29:25 AM	BCl3 valve closed
11/6/2011	9:29:25 AM	PH3 valve closed
11/6/2011	9:29:25 AM	SiCl4 pre valve closed
11/6/2011	9:29:25 AM	SiCl4 post valve closed
11/6/2011	9:29:25 AM	Main Vac valve closed
11/6/2011	9:29:25 AM	Bypass valve closed
11/6/2011	9:29:25 AM	H2 valve opened
11/6/2011	9:29:25 AM	Bubbler valve opened
11/6/2011	9:29:25 AM	Helium MFC set to  0.000000
11/6/2011	9:29:25 AM	H2 MFC set to  500.000000
11/6/2011	9:29:25 AM	BCl3 MFC set to  0.000000
11/6/2011	9:29:25 AM	PHl3 MFC set to  0.000000
11/6/2011	9:29:25 AM	SiCl4 MFC set to  0.000000
11/6/2011	9:29:25 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:29:26 AM	Tube furnace set to 1000
11/6/2011	9:29:27 AM	Helium valve closed
11/6/2011	9:29:27 AM	BCl3 valve closed
11/6/2011	9:29:27 AM	PH3 valve closed
11/6/2011	9:29:27 AM	SiCl4 pre valve closed
11/6/2011	9:29:27 AM	SiCl4 post valve closed
11/6/2011	9:29:27 AM	Main Vac valve closed
11/6/2011	9:29:27 AM	Bypass valve closed
11/6/2011	9:29:27 AM	H2 valve opened
11/6/2011	9:29:27 AM	Bubbler valve opened
11/6/2011	9:29:27 AM	Helium MFC set to  0.000000
11/6/2011	9:29:27 AM	H2 MFC set to  500.000000
11/6/2011	9:29:27 AM	BCl3 MFC set to  0.000000
11/6/2011	9:29:27 AM	PHl3 MFC set to  0.000000
11/6/2011	9:29:27 AM	SiCl4 MFC set to  0.000000
11/6/2011	9:29:27 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:29:27 AM	Tube furnace set to 1000
11/6/2011	9:53:27 AM	Helium valve closed
11/6/2011	9:53:27 AM	PH3 valve closed
11/6/2011	9:53:27 AM	Main Vac valve closed
11/6/2011	9:53:27 AM	Bypass valve closed
11/6/2011	9:53:27 AM	H2 valve opened
11/6/2011	9:53:27 AM	BCl3 valve opened
11/6/2011	9:53:27 AM	SiCl4 pre valve opened
11/6/2011	9:53:27 AM	SiCl4 post valve opened
11/6/2011	9:53:27 AM	Bubbler valve opened
11/6/2011	9:53:27 AM	Helium MFC set to  0.000000
11/6/2011	9:53:27 AM	H2 MFC set to  500.000000
11/6/2011	9:53:27 AM	BCl3 MFC set to  2.000000
11/6/2011	9:53:27 AM	PHl3 MFC set to  0.000000
11/6/2011	9:53:27 AM	SiCl4 MFC set to  20.000000
11/6/2011	9:53:27 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:53:27 AM	Tube furnace set to 1000
11/6/2011	10:03:27 AM	Helium valve closed
11/6/2011	10:03:27 AM	BCl3 valve closed
11/6/2011	10:03:27 AM	PH3 valve closed
11/6/2011	10:03:27 AM	SiCl4 pre valve closed
11/6/2011	10:03:27 AM	SiCl4 post valve closed
11/6/2011	10:03:27 AM	Main Vac valve closed
11/6/2011	10:03:27 AM	Bypass valve closed
11/6/2011	10:03:27 AM	H2 valve opened
11/6/2011	10:03:27 AM	Bubbler valve opened
11/6/2011	10:03:27 AM	Helium MFC set to  0.000000
11/6/2011	10:03:27 AM	H2 MFC set to  450.000000
11/6/2011	10:03:27 AM	BCl3 MFC set to  0.000000
11/6/2011	10:03:27 AM	PHl3 MFC set to  0.000000
11/6/2011	10:03:27 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:03:27 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:03:27 AM	Tube furnace set to 650
11/6/2011	10:13:27 AM	H2 valve closed
11/6/2011	10:13:27 AM	BCl3 valve closed
11/6/2011	10:13:27 AM	PH3 valve closed
11/6/2011	10:13:27 AM	SiCl4 pre valve closed
11/6/2011	10:13:27 AM	SiCl4 post valve closed
11/6/2011	10:13:27 AM	Main Vac valve closed
11/6/2011	10:13:27 AM	Bypass valve closed
11/6/2011	10:13:27 AM	Helium valve opened
11/6/2011	10:13:27 AM	Bubbler valve opened
11/6/2011	10:13:27 AM	Helium MFC set to  400.000000
11/6/2011	10:13:27 AM	H2 MFC set to  0.000000
11/6/2011	10:13:27 AM	BCl3 MFC set to  0.000000
11/6/2011	10:13:27 AM	PHl3 MFC set to  0.000000
11/6/2011	10:13:27 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:13:27 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:13:27 AM	Tube furnace set to 0
11/6/2011	10:35:08 AM	Helium valve closed
11/6/2011	10:35:08 AM	H2 valve closed
11/6/2011	10:35:08 AM	BCl3 valve closed
11/6/2011	10:35:08 AM	PH3 valve closed
11/6/2011	10:35:08 AM	SiCl4 pre valve closed
11/6/2011	10:35:08 AM	SiCl4 post valve closed
11/6/2011	10:35:08 AM	Main Vac valve closed
11/6/2011	10:35:08 AM	Bypass valve closed
11/6/2011	10:35:08 AM	Bubbler valve closed
11/6/2011	10:35:08 AM	Helium MFC set to  0.000000
11/6/2011	10:35:08 AM	H2 MFC set to  0.000000
11/6/2011	10:35:08 AM	BCl3 MFC set to  0.000000
11/6/2011	10:35:08 AM	PHl3 MFC set to  0.000000
11/6/2011	10:35:08 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:35:08 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:35:08 AM	Tube furnace set to 0
11/6/2011	10:35:13 AM	Helium valve closed
11/6/2011	10:35:13 AM	H2 valve closed
11/6/2011	10:35:13 AM	BCl3 valve closed
11/6/2011	10:35:13 AM	PH3 valve closed
11/6/2011	10:35:13 AM	SiCl4 pre valve closed
11/6/2011	10:35:13 AM	SiCl4 post valve closed
11/6/2011	10:35:13 AM	Main Vac valve closed
11/6/2011	10:35:13 AM	Bubbler valve closed
11/6/2011	10:35:13 AM	Bypass valve opened
11/6/2011	10:35:13 AM	Helium MFC set to  0.000000
11/6/2011	10:35:13 AM	H2 MFC set to  0.000000
11/6/2011	10:35:13 AM	BCl3 MFC set to  0.000000
11/6/2011	10:35:13 AM	PHl3 MFC set to  0.000000
11/6/2011	10:35:13 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:35:13 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:35:13 AM	Tube furnace set to 0
11/6/2011	10:35:17 AM	Helium valve closed
11/6/2011	10:35:17 AM	H2 valve closed
11/6/2011	10:35:17 AM	BCl3 valve closed
11/6/2011	10:35:17 AM	PH3 valve closed
11/6/2011	10:35:17 AM	SiCl4 pre valve closed
11/6/2011	10:35:17 AM	SiCl4 post valve closed
11/6/2011	10:35:17 AM	Main Vac valve closed
11/6/2011	10:35:17 AM	Bypass valve closed
11/6/2011	10:35:17 AM	Bubbler valve closed
11/6/2011	10:35:17 AM	Helium MFC set to  0.000000
11/6/2011	10:35:17 AM	H2 MFC set to  0.000000
11/6/2011	10:35:17 AM	BCl3 MFC set to  0.000000
11/6/2011	10:35:17 AM	PHl3 MFC set to  0.000000
11/6/2011	10:35:17 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:35:17 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:35:17 AM	Tube furnace set to 0
11/6/2011	10:35:18 AM	Run finished at 10:35 AM
11/6/2011	10:35:28 AM	Helium MFC set to  500.000000
11/6/2011	10:35:32 AM	Helium valve opened
11/6/2011	10:36:16 AM	Helium valve closed
11/6/2011	10:36:20 AM	Helium MFC set to  0.000000
11/6/2011	10:40:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	10:40:50 AM	Recipe started at 10:40 AM
11/6/2011	10:40:50 AM	Helium valve closed
11/6/2011	10:40:50 AM	H2 valve closed
11/6/2011	10:40:50 AM	BCl3 valve closed
11/6/2011	10:40:50 AM	PH3 valve closed
11/6/2011	10:40:50 AM	SiCl4 pre valve closed
11/6/2011	10:40:50 AM	SiCl4 post valve closed
11/6/2011	10:40:50 AM	Main Vac valve closed
11/6/2011	10:40:50 AM	Bubbler valve closed
11/6/2011	10:40:50 AM	Bypass valve opened
11/6/2011	10:40:50 AM	Helium MFC set to  0.000000
11/6/2011	10:40:50 AM	H2 MFC set to  0.000000
11/6/2011	10:40:50 AM	BCl3 MFC set to  0.000000
11/6/2011	10:40:50 AM	PHl3 MFC set to  0.000000
11/6/2011	10:40:50 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:40:50 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:40:50 AM	Tube furnace set to 0
11/6/2011	10:41:57 AM	Helium valve closed
11/6/2011	10:41:57 AM	H2 valve closed
11/6/2011	10:41:57 AM	BCl3 valve closed
11/6/2011	10:41:57 AM	PH3 valve closed
11/6/2011	10:41:57 AM	SiCl4 pre valve closed
11/6/2011	10:41:57 AM	SiCl4 post valve closed
11/6/2011	10:41:57 AM	Main Vac valve closed
11/6/2011	10:41:57 AM	Bubbler valve closed
11/6/2011	10:41:57 AM	Bypass valve opened
11/6/2011	10:41:57 AM	Helium MFC set to  0.000000
11/6/2011	10:41:57 AM	H2 MFC set to  0.000000
11/6/2011	10:41:57 AM	BCl3 MFC set to  0.000000
11/6/2011	10:41:57 AM	PHl3 MFC set to  0.000000
11/6/2011	10:41:57 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:41:57 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:41:57 AM	Tube furnace set to 0
11/6/2011	10:42:57 AM	Helium valve closed
11/6/2011	10:42:57 AM	H2 valve closed
11/6/2011	10:42:57 AM	BCl3 valve closed
11/6/2011	10:42:57 AM	PH3 valve closed
11/6/2011	10:42:57 AM	SiCl4 pre valve closed
11/6/2011	10:42:57 AM	SiCl4 post valve closed
11/6/2011	10:42:57 AM	Bypass valve closed
11/6/2011	10:42:57 AM	Bubbler valve closed
11/6/2011	10:42:57 AM	Main Vac valve opened
11/6/2011	10:42:57 AM	Helium MFC set to  0.000000
11/6/2011	10:42:57 AM	H2 MFC set to  0.000000
11/6/2011	10:42:57 AM	BCl3 MFC set to  0.000000
11/6/2011	10:42:57 AM	PHl3 MFC set to  0.000000
11/6/2011	10:42:57 AM	SiCl4 MFC set to  0.000000
11/6/2011	10:42:57 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:42:57 AM	Tube furnace set to 0
11/6/2011	10:42:58 AM	Run finished at 10:42 AM
11/6/2011	10:42:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	10:52:13 AM	Helium MFC set to  20.000000
11/6/2011	10:52:19 AM	Helium valve opened
11/6/2011	10:53:08 AM	Helium valve closed
11/6/2011	10:55:16 AM	Main Vac valve closed
11/6/2011	10:55:27 AM	Main Vac valve opened
11/6/2011	10:55:29 AM	Helium valve opened
11/6/2011	10:56:49 AM	Helium valve closed
11/6/2011	10:57:56 AM	Helium valve opened
11/6/2011	10:58:31 AM	Helium valve closed
11/6/2011	11:04:29 AM	Helium valve opened
11/6/2011	11:04:44 AM	Helium valve closed
11/6/2011	11:05:11 AM	Main Vac valve closed
11/6/2011	11:05:33 AM	Main Vac valve opened
11/6/2011	11:05:42 AM	Helium valve opened
11/6/2011	11:06:40 AM	Helium valve closed
11/6/2011	11:07:11 AM	Main Vac valve closed
11/6/2011	11:07:33 AM	Main Vac valve opened
11/6/2011	11:09:10 AM	Main Vac valve closed
11/6/2011	11:09:33 AM	Main Vac valve opened
11/6/2011	11:09:34 AM	Helium valve opened
11/6/2011	11:10:01 AM	Helium valve closed
11/6/2011	11:10:05 AM	Helium MFC set to  0.000000
11/6/2011	11:10:30 AM	Main Vac valve closed
11/6/2011	11:10:54 AM	Main Vac valve opened
11/6/2011	11:11:18 AM	Recipe started at 11:11 AM
11/6/2011	11:11:18 AM	Helium valve closed
11/6/2011	11:11:18 AM	H2 valve closed
11/6/2011	11:11:18 AM	BCl3 valve closed
11/6/2011	11:11:18 AM	PH3 valve closed
11/6/2011	11:11:18 AM	SiCl4 pre valve closed
11/6/2011	11:11:18 AM	SiCl4 post valve closed
11/6/2011	11:11:18 AM	Main Vac valve closed
11/6/2011	11:11:18 AM	Bypass valve closed
11/6/2011	11:11:18 AM	Bubbler valve closed
11/6/2011	11:11:18 AM	Helium MFC set to  0.000000
11/6/2011	11:11:18 AM	H2 MFC set to  0.000000
11/6/2011	11:11:18 AM	BCl3 MFC set to  0.000000
11/6/2011	11:11:18 AM	PHl3 MFC set to  0.000000
11/6/2011	11:11:18 AM	SiCl4 MFC set to  0.000000
11/6/2011	11:11:18 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	11:11:18 AM	Tube furnace set to 0
11/6/2011	11:11:21 AM	Helium valve closed
11/6/2011	11:11:21 AM	BCl3 valve closed
11/6/2011	11:11:21 AM	PH3 valve closed
11/6/2011	11:11:21 AM	SiCl4 pre valve closed
11/6/2011	11:11:21 AM	SiCl4 post valve closed
11/6/2011	11:11:21 AM	Main Vac valve closed
11/6/2011	11:11:21 AM	Bypass valve closed
11/6/2011	11:11:21 AM	Bubbler valve closed
11/6/2011	11:11:21 AM	H2 valve opened
11/6/2011	11:11:21 AM	Helium MFC set to  0.000000
11/6/2011	11:11:21 AM	H2 MFC set to  500.000000
11/6/2011	11:11:21 AM	BCl3 MFC set to  0.000000
11/6/2011	11:11:21 AM	PHl3 MFC set to  0.000000
11/6/2011	11:11:21 AM	SiCl4 MFC set to  0.000000
11/6/2011	11:11:21 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	11:11:21 AM	Tube furnace set to 100
11/6/2011	11:12:28 AM	Helium valve closed
11/6/2011	11:12:28 AM	BCl3 valve closed
11/6/2011	11:12:28 AM	PH3 valve closed
11/6/2011	11:12:28 AM	SiCl4 pre valve closed
11/6/2011	11:12:28 AM	SiCl4 post valve closed
11/6/2011	11:12:28 AM	Main Vac valve closed
11/6/2011	11:12:28 AM	Bypass valve closed
11/6/2011	11:12:28 AM	H2 valve opened
11/6/2011	11:12:28 AM	Bubbler valve opened
11/6/2011	11:12:28 AM	Helium MFC set to  0.000000
11/6/2011	11:12:28 AM	H2 MFC set to  500.000000
11/6/2011	11:12:28 AM	BCl3 MFC set to  0.000000
11/6/2011	11:12:28 AM	PHl3 MFC set to  0.000000
11/6/2011	11:12:28 AM	SiCl4 MFC set to  0.000000
11/6/2011	11:12:28 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	11:12:28 AM	Tube furnace set to 1000
11/6/2011	11:12:29 AM	Helium valve closed
11/6/2011	11:12:29 AM	BCl3 valve closed
11/6/2011	11:12:29 AM	PH3 valve closed
11/6/2011	11:12:29 AM	SiCl4 pre valve closed
11/6/2011	11:12:29 AM	SiCl4 post valve closed
11/6/2011	11:12:29 AM	Main Vac valve closed
11/6/2011	11:12:29 AM	Bypass valve closed
11/6/2011	11:12:29 AM	H2 valve opened
11/6/2011	11:12:29 AM	Bubbler valve opened
11/6/2011	11:12:29 AM	Helium MFC set to  0.000000
11/6/2011	11:12:29 AM	H2 MFC set to  450.000000
11/6/2011	11:12:29 AM	BCl3 MFC set to  0.000000
11/6/2011	11:12:29 AM	PHl3 MFC set to  0.000000
11/6/2011	11:12:29 AM	SiCl4 MFC set to  0.000000
11/6/2011	11:12:29 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	11:12:30 AM	Tube furnace set to 1000
11/6/2011	11:36:30 AM	Helium valve closed
11/6/2011	11:36:30 AM	PH3 valve closed
11/6/2011	11:36:30 AM	Main Vac valve closed
11/6/2011	11:36:30 AM	Bypass valve closed
11/6/2011	11:36:30 AM	H2 valve opened
11/6/2011	11:36:30 AM	BCl3 valve opened
11/6/2011	11:36:30 AM	SiCl4 pre valve opened
11/6/2011	11:36:30 AM	SiCl4 post valve opened
11/6/2011	11:36:30 AM	Bubbler valve opened
11/6/2011	11:36:30 AM	Helium MFC set to  0.000000
11/6/2011	11:36:30 AM	H2 MFC set to  498.000000
11/6/2011	11:36:30 AM	BCl3 MFC set to  2.000000
11/6/2011	11:36:30 AM	PHl3 MFC set to  0.000000
11/6/2011	11:36:30 AM	SiCl4 MFC set to  22.000000
11/6/2011	11:36:30 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	11:36:30 AM	Tube furnace set to 1000
11/6/2011	11:56:30 AM	Helium valve closed
11/6/2011	11:56:30 AM	BCl3 valve closed
11/6/2011	11:56:30 AM	PH3 valve closed
11/6/2011	11:56:30 AM	SiCl4 pre valve closed
11/6/2011	11:56:30 AM	SiCl4 post valve closed
11/6/2011	11:56:30 AM	Main Vac valve closed
11/6/2011	11:56:30 AM	Bypass valve closed
11/6/2011	11:56:30 AM	H2 valve opened
11/6/2011	11:56:30 AM	Bubbler valve opened
11/6/2011	11:56:30 AM	Helium MFC set to  0.000000
11/6/2011	11:56:30 AM	H2 MFC set to  450.000000
11/6/2011	11:56:30 AM	BCl3 MFC set to  0.000000
11/6/2011	11:56:30 AM	PHl3 MFC set to  0.000000
11/6/2011	11:56:30 AM	SiCl4 MFC set to  0.000000
11/6/2011	11:56:30 AM	Bypass solenoid MFC set to  0.000000
11/6/2011	11:56:30 AM	Tube furnace set to 650
11/6/2011	12:06:30 PM	H2 valve closed
11/6/2011	12:06:30 PM	BCl3 valve closed
11/6/2011	12:06:30 PM	PH3 valve closed
11/6/2011	12:06:30 PM	SiCl4 pre valve closed
11/6/2011	12:06:30 PM	SiCl4 post valve closed
11/6/2011	12:06:30 PM	Main Vac valve closed
11/6/2011	12:06:30 PM	Bypass valve closed
11/6/2011	12:06:30 PM	Helium valve opened
11/6/2011	12:06:30 PM	Bubbler valve opened
11/6/2011	12:06:30 PM	Helium MFC set to  400.000000
11/6/2011	12:06:30 PM	H2 MFC set to  0.000000
11/6/2011	12:06:30 PM	BCl3 MFC set to  0.000000
11/6/2011	12:06:30 PM	PHl3 MFC set to  0.000000
11/6/2011	12:06:30 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:06:30 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:06:30 PM	Tube furnace set to 0
11/6/2011	12:36:30 PM	Helium valve closed
11/6/2011	12:36:30 PM	H2 valve closed
11/6/2011	12:36:30 PM	BCl3 valve closed
11/6/2011	12:36:30 PM	PH3 valve closed
11/6/2011	12:36:30 PM	SiCl4 pre valve closed
11/6/2011	12:36:30 PM	SiCl4 post valve closed
11/6/2011	12:36:30 PM	Main Vac valve closed
11/6/2011	12:36:30 PM	Bypass valve closed
11/6/2011	12:36:30 PM	Bubbler valve closed
11/6/2011	12:36:30 PM	Helium MFC set to  0.000000
11/6/2011	12:36:30 PM	H2 MFC set to  0.000000
11/6/2011	12:36:30 PM	BCl3 MFC set to  0.000000
11/6/2011	12:36:30 PM	PHl3 MFC set to  0.000000
11/6/2011	12:36:30 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:36:30 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:36:30 PM	Tube furnace set to 0
11/6/2011	12:40:50 PM	Run aborted at 12:40 PM
11/6/2011	12:40:50 PM	Helium valve closed
11/6/2011	12:40:50 PM	H2 valve closed
11/6/2011	12:40:50 PM	BCl3 valve closed
11/6/2011	12:40:50 PM	PH3 valve closed
11/6/2011	12:40:50 PM	SiCl4 pre valve closed
11/6/2011	12:40:50 PM	SiCl4 post valve closed
11/6/2011	12:40:50 PM	Bypass valve closed
11/6/2011	12:40:50 PM	Main Vac valve closed
11/6/2011	12:40:50 PM	Bubbler valve closed
11/6/2011	12:40:50 PM	Helium MFC set to  0.000000
11/6/2011	12:40:50 PM	H2 MFC set to  0.000000
11/6/2011	12:40:50 PM	BCl3 MFC set to  0.000000
11/6/2011	12:40:50 PM	PHl3 MFC set to  0.000000
11/6/2011	12:40:50 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:40:51 PM	Tube furnace set to 0
11/6/2011	12:46:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	12:46:13 PM	Recipe started at 12:46 PM
11/6/2011	12:46:13 PM	Helium valve closed
11/6/2011	12:46:13 PM	H2 valve closed
11/6/2011	12:46:13 PM	BCl3 valve closed
11/6/2011	12:46:13 PM	PH3 valve closed
11/6/2011	12:46:13 PM	SiCl4 pre valve closed
11/6/2011	12:46:13 PM	SiCl4 post valve closed
11/6/2011	12:46:13 PM	Main Vac valve closed
11/6/2011	12:46:13 PM	Bubbler valve closed
11/6/2011	12:46:13 PM	Bypass valve opened
11/6/2011	12:46:13 PM	Helium MFC set to  0.000000
11/6/2011	12:46:13 PM	H2 MFC set to  0.000000
11/6/2011	12:46:13 PM	BCl3 MFC set to  0.000000
11/6/2011	12:46:13 PM	PHl3 MFC set to  0.000000
11/6/2011	12:46:13 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:46:13 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:46:13 PM	Tube furnace set to 0
11/6/2011	12:47:21 PM	Helium valve closed
11/6/2011	12:47:21 PM	H2 valve closed
11/6/2011	12:47:21 PM	BCl3 valve closed
11/6/2011	12:47:21 PM	PH3 valve closed
11/6/2011	12:47:21 PM	SiCl4 pre valve closed
11/6/2011	12:47:21 PM	SiCl4 post valve closed
11/6/2011	12:47:21 PM	Main Vac valve closed
11/6/2011	12:47:21 PM	Bubbler valve closed
11/6/2011	12:47:21 PM	Bypass valve opened
11/6/2011	12:47:21 PM	Helium MFC set to  0.000000
11/6/2011	12:47:21 PM	H2 MFC set to  0.000000
11/6/2011	12:47:21 PM	BCl3 MFC set to  0.000000
11/6/2011	12:47:21 PM	PHl3 MFC set to  0.000000
11/6/2011	12:47:21 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:47:21 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:47:21 PM	Tube furnace set to 0
11/6/2011	12:48:21 PM	Helium valve closed
11/6/2011	12:48:21 PM	H2 valve closed
11/6/2011	12:48:21 PM	BCl3 valve closed
11/6/2011	12:48:21 PM	PH3 valve closed
11/6/2011	12:48:21 PM	SiCl4 pre valve closed
11/6/2011	12:48:21 PM	SiCl4 post valve closed
11/6/2011	12:48:21 PM	Bypass valve closed
11/6/2011	12:48:21 PM	Bubbler valve closed
11/6/2011	12:48:21 PM	Main Vac valve opened
11/6/2011	12:48:21 PM	Helium MFC set to  0.000000
11/6/2011	12:48:21 PM	H2 MFC set to  0.000000
11/6/2011	12:48:21 PM	BCl3 MFC set to  0.000000
11/6/2011	12:48:21 PM	PHl3 MFC set to  0.000000
11/6/2011	12:48:21 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:48:21 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:48:21 PM	Tube furnace set to 0
11/6/2011	12:48:22 PM	Run finished at 12:48 PM
11/6/2011	12:48:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	12:55:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	12:55:15 PM	Recipe started at 12:55 PM
11/6/2011	12:55:15 PM	Helium valve closed
11/6/2011	12:55:15 PM	H2 valve closed
11/6/2011	12:55:15 PM	BCl3 valve closed
11/6/2011	12:55:15 PM	PH3 valve closed
11/6/2011	12:55:15 PM	SiCl4 pre valve closed
11/6/2011	12:55:15 PM	SiCl4 post valve closed
11/6/2011	12:55:15 PM	Main Vac valve closed
11/6/2011	12:55:15 PM	Bypass valve closed
11/6/2011	12:55:15 PM	Bubbler valve closed
11/6/2011	12:55:15 PM	Helium MFC set to  0.000000
11/6/2011	12:55:15 PM	H2 MFC set to  0.000000
11/6/2011	12:55:15 PM	BCl3 MFC set to  0.000000
11/6/2011	12:55:15 PM	PHl3 MFC set to  0.000000
11/6/2011	12:55:15 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:55:15 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:55:15 PM	Tube furnace set to 0
11/6/2011	12:55:18 PM	H2 valve closed
11/6/2011	12:55:18 PM	BCl3 valve closed
11/6/2011	12:55:18 PM	PH3 valve closed
11/6/2011	12:55:18 PM	SiCl4 pre valve closed
11/6/2011	12:55:18 PM	SiCl4 post valve closed
11/6/2011	12:55:18 PM	Main Vac valve closed
11/6/2011	12:55:18 PM	Bypass valve closed
11/6/2011	12:55:18 PM	Bubbler valve closed
11/6/2011	12:55:18 PM	Helium valve opened
11/6/2011	12:55:18 PM	Helium MFC set to  500.000000
11/6/2011	12:55:18 PM	H2 MFC set to  0.000000
11/6/2011	12:55:18 PM	BCl3 MFC set to  0.000000
11/6/2011	12:55:18 PM	PHl3 MFC set to  0.000000
11/6/2011	12:55:18 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:55:18 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:55:18 PM	Tube furnace set to 0
11/6/2011	12:56:23 PM	Helium valve closed
11/6/2011	12:56:23 PM	H2 valve closed
11/6/2011	12:56:23 PM	BCl3 valve closed
11/6/2011	12:56:23 PM	PH3 valve closed
11/6/2011	12:56:23 PM	SiCl4 pre valve closed
11/6/2011	12:56:23 PM	SiCl4 post valve closed
11/6/2011	12:56:23 PM	Main Vac valve closed
11/6/2011	12:56:23 PM	Bypass valve closed
11/6/2011	12:56:23 PM	Bubbler valve closed
11/6/2011	12:56:23 PM	Helium MFC set to  0.000000
11/6/2011	12:56:23 PM	H2 MFC set to  0.000000
11/6/2011	12:56:23 PM	BCl3 MFC set to  0.000000
11/6/2011	12:56:23 PM	PHl3 MFC set to  0.000000
11/6/2011	12:56:23 PM	SiCl4 MFC set to  0.000000
11/6/2011	12:56:23 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	12:56:23 PM	Tube furnace set to 0
11/6/2011	12:56:24 PM	Run finished at 12:56 PM
11/6/2011	12:56:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	1:01:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	1:01:33 PM	Recipe started at 1:01 PM
11/6/2011	1:01:33 PM	Helium valve closed
11/6/2011	1:01:33 PM	H2 valve closed
11/6/2011	1:01:33 PM	BCl3 valve closed
11/6/2011	1:01:33 PM	PH3 valve closed
11/6/2011	1:01:33 PM	SiCl4 pre valve closed
11/6/2011	1:01:33 PM	SiCl4 post valve closed
11/6/2011	1:01:33 PM	Main Vac valve closed
11/6/2011	1:01:33 PM	Bubbler valve closed
11/6/2011	1:01:33 PM	Bypass valve opened
11/6/2011	1:01:33 PM	Helium MFC set to  0.000000
11/6/2011	1:01:33 PM	H2 MFC set to  0.000000
11/6/2011	1:01:33 PM	BCl3 MFC set to  0.000000
11/6/2011	1:01:33 PM	PHl3 MFC set to  0.000000
11/6/2011	1:01:33 PM	SiCl4 MFC set to  0.000000
11/6/2011	1:01:33 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	1:01:33 PM	Tube furnace set to 0
11/6/2011	1:02:45 PM	Helium valve closed
11/6/2011	1:02:45 PM	H2 valve closed
11/6/2011	1:02:45 PM	BCl3 valve closed
11/6/2011	1:02:45 PM	PH3 valve closed
11/6/2011	1:02:45 PM	SiCl4 pre valve closed
11/6/2011	1:02:45 PM	SiCl4 post valve closed
11/6/2011	1:02:45 PM	Main Vac valve closed
11/6/2011	1:02:45 PM	Bubbler valve closed
11/6/2011	1:02:45 PM	Bypass valve opened
11/6/2011	1:02:45 PM	Helium MFC set to  0.000000
11/6/2011	1:02:45 PM	H2 MFC set to  0.000000
11/6/2011	1:02:45 PM	BCl3 MFC set to  0.000000
11/6/2011	1:02:45 PM	PHl3 MFC set to  0.000000
11/6/2011	1:02:45 PM	SiCl4 MFC set to  0.000000
11/6/2011	1:02:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	1:02:45 PM	Tube furnace set to 0
11/6/2011	1:03:45 PM	Helium valve closed
11/6/2011	1:03:45 PM	H2 valve closed
11/6/2011	1:03:45 PM	BCl3 valve closed
11/6/2011	1:03:45 PM	PH3 valve closed
11/6/2011	1:03:45 PM	SiCl4 pre valve closed
11/6/2011	1:03:45 PM	SiCl4 post valve closed
11/6/2011	1:03:45 PM	Bypass valve closed
11/6/2011	1:03:45 PM	Bubbler valve closed
11/6/2011	1:03:45 PM	Main Vac valve opened
11/6/2011	1:03:45 PM	Helium MFC set to  0.000000
11/6/2011	1:03:45 PM	H2 MFC set to  0.000000
11/6/2011	1:03:45 PM	BCl3 MFC set to  0.000000
11/6/2011	1:03:45 PM	PHl3 MFC set to  0.000000
11/6/2011	1:03:45 PM	SiCl4 MFC set to  0.000000
11/6/2011	1:03:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	1:03:46 PM	Tube furnace set to 0
11/6/2011	1:03:47 PM	Run finished at 1:03 PM
11/6/2011	1:03:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	1:13:52 PM	Helium MFC set to  20.000000
11/6/2011	1:13:54 PM	Helium valve opened
11/6/2011	1:14:08 PM	Helium valve closed
11/6/2011	2:11:20 PM	Main Vac valve closed
11/6/2011	2:11:43 PM	Main Vac valve opened
11/6/2011	2:12:27 PM	Recipe started at 2:12 PM
11/6/2011	2:12:27 PM	Helium valve closed
11/6/2011	2:12:27 PM	H2 valve closed
11/6/2011	2:12:27 PM	BCl3 valve closed
11/6/2011	2:12:27 PM	PH3 valve closed
11/6/2011	2:12:27 PM	SiCl4 pre valve closed
11/6/2011	2:12:27 PM	SiCl4 post valve closed
11/6/2011	2:12:27 PM	Main Vac valve closed
11/6/2011	2:12:27 PM	Bypass valve closed
11/6/2011	2:12:27 PM	Bubbler valve closed
11/6/2011	2:12:27 PM	Helium MFC set to  0.000000
11/6/2011	2:12:27 PM	H2 MFC set to  0.000000
11/6/2011	2:12:27 PM	BCl3 MFC set to  0.000000
11/6/2011	2:12:27 PM	PHl3 MFC set to  0.000000
11/6/2011	2:12:27 PM	SiCl4 MFC set to  0.000000
11/6/2011	2:12:27 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	2:12:27 PM	Tube furnace set to 0
11/6/2011	2:12:30 PM	Helium valve closed
11/6/2011	2:12:30 PM	BCl3 valve closed
11/6/2011	2:12:30 PM	PH3 valve closed
11/6/2011	2:12:30 PM	SiCl4 pre valve closed
11/6/2011	2:12:30 PM	SiCl4 post valve closed
11/6/2011	2:12:30 PM	Main Vac valve closed
11/6/2011	2:12:30 PM	Bypass valve closed
11/6/2011	2:12:30 PM	Bubbler valve closed
11/6/2011	2:12:30 PM	H2 valve opened
11/6/2011	2:12:30 PM	Helium MFC set to  0.000000
11/6/2011	2:12:30 PM	H2 MFC set to  500.000000
11/6/2011	2:12:30 PM	BCl3 MFC set to  0.000000
11/6/2011	2:12:30 PM	PHl3 MFC set to  0.000000
11/6/2011	2:12:30 PM	SiCl4 MFC set to  0.000000
11/6/2011	2:12:30 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	2:12:30 PM	Tube furnace set to 100
11/6/2011	2:13:37 PM	Helium valve closed
11/6/2011	2:13:37 PM	BCl3 valve closed
11/6/2011	2:13:37 PM	PH3 valve closed
11/6/2011	2:13:37 PM	SiCl4 pre valve closed
11/6/2011	2:13:37 PM	SiCl4 post valve closed
11/6/2011	2:13:37 PM	Main Vac valve closed
11/6/2011	2:13:37 PM	Bypass valve closed
11/6/2011	2:13:37 PM	H2 valve opened
11/6/2011	2:13:37 PM	Bubbler valve opened
11/6/2011	2:13:37 PM	Helium MFC set to  0.000000
11/6/2011	2:13:37 PM	H2 MFC set to  500.000000
11/6/2011	2:13:37 PM	BCl3 MFC set to  0.000000
11/6/2011	2:13:37 PM	PHl3 MFC set to  0.000000
11/6/2011	2:13:37 PM	SiCl4 MFC set to  0.000000
11/6/2011	2:13:37 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	2:13:37 PM	Tube furnace set to 1000
11/6/2011	2:13:38 PM	Helium valve closed
11/6/2011	2:13:38 PM	BCl3 valve closed
11/6/2011	2:13:38 PM	PH3 valve closed
11/6/2011	2:13:38 PM	SiCl4 pre valve closed
11/6/2011	2:13:38 PM	SiCl4 post valve closed
11/6/2011	2:13:38 PM	Main Vac valve closed
11/6/2011	2:13:38 PM	Bypass valve closed
11/6/2011	2:13:38 PM	H2 valve opened
11/6/2011	2:13:38 PM	Bubbler valve opened
11/6/2011	2:13:38 PM	Helium MFC set to  0.000000
11/6/2011	2:13:38 PM	H2 MFC set to  450.000000
11/6/2011	2:13:38 PM	BCl3 MFC set to  0.000000
11/6/2011	2:13:38 PM	PHl3 MFC set to  0.000000
11/6/2011	2:13:38 PM	SiCl4 MFC set to  0.000000
11/6/2011	2:13:38 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	2:13:38 PM	Tube furnace set to 1000
11/6/2011	2:37:38 PM	Helium valve closed
11/6/2011	2:37:38 PM	PH3 valve closed
11/6/2011	2:37:38 PM	Main Vac valve closed
11/6/2011	2:37:38 PM	Bypass valve closed
11/6/2011	2:37:38 PM	H2 valve opened
11/6/2011	2:37:38 PM	BCl3 valve opened
11/6/2011	2:37:38 PM	SiCl4 pre valve opened
11/6/2011	2:37:38 PM	SiCl4 post valve opened
11/6/2011	2:37:38 PM	Bubbler valve opened
11/6/2011	2:37:38 PM	Helium MFC set to  0.000000
11/6/2011	2:37:38 PM	H2 MFC set to  498.000000
11/6/2011	2:37:38 PM	BCl3 MFC set to  2.000000
11/6/2011	2:37:38 PM	PHl3 MFC set to  0.000000
11/6/2011	2:37:38 PM	SiCl4 MFC set to  22.000000
11/6/2011	2:37:38 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	2:37:39 PM	Tube furnace set to 1000
11/6/2011	2:57:38 PM	Helium valve closed
11/6/2011	2:57:38 PM	BCl3 valve closed
11/6/2011	2:57:38 PM	PH3 valve closed
11/6/2011	2:57:38 PM	SiCl4 pre valve closed
11/6/2011	2:57:38 PM	SiCl4 post valve closed
11/6/2011	2:57:38 PM	Main Vac valve closed
11/6/2011	2:57:38 PM	Bypass valve closed
11/6/2011	2:57:38 PM	H2 valve opened
11/6/2011	2:57:39 PM	Bubbler valve opened
11/6/2011	2:57:39 PM	Helium MFC set to  0.000000
11/6/2011	2:57:39 PM	H2 MFC set to  450.000000
11/6/2011	2:57:39 PM	BCl3 MFC set to  0.000000
11/6/2011	2:57:39 PM	PHl3 MFC set to  0.000000
11/6/2011	2:57:39 PM	SiCl4 MFC set to  0.000000
11/6/2011	2:57:39 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	2:57:39 PM	Tube furnace set to 650
11/6/2011	3:07:39 PM	H2 valve closed
11/6/2011	3:07:39 PM	BCl3 valve closed
11/6/2011	3:07:39 PM	PH3 valve closed
11/6/2011	3:07:39 PM	SiCl4 pre valve closed
11/6/2011	3:07:39 PM	SiCl4 post valve closed
11/6/2011	3:07:39 PM	Main Vac valve closed
11/6/2011	3:07:39 PM	Bypass valve closed
11/6/2011	3:07:39 PM	Helium valve opened
11/6/2011	3:07:39 PM	Bubbler valve opened
11/6/2011	3:07:39 PM	Helium MFC set to  400.000000
11/6/2011	3:07:39 PM	H2 MFC set to  0.000000
11/6/2011	3:07:39 PM	BCl3 MFC set to  0.000000
11/6/2011	3:07:39 PM	PHl3 MFC set to  0.000000
11/6/2011	3:07:39 PM	SiCl4 MFC set to  0.000000
11/6/2011	3:07:39 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	3:07:39 PM	Tube furnace set to 0
11/6/2011	3:31:24 PM	Helium valve closed
11/6/2011	3:31:24 PM	H2 valve closed
11/6/2011	3:31:24 PM	BCl3 valve closed
11/6/2011	3:31:24 PM	PH3 valve closed
11/6/2011	3:31:24 PM	SiCl4 pre valve closed
11/6/2011	3:31:24 PM	SiCl4 post valve closed
11/6/2011	3:31:24 PM	Main Vac valve closed
11/6/2011	3:31:24 PM	Bypass valve closed
11/6/2011	3:31:24 PM	Bubbler valve closed
11/6/2011	3:31:24 PM	Helium MFC set to  0.000000
11/6/2011	3:31:24 PM	H2 MFC set to  0.000000
11/6/2011	3:31:24 PM	BCl3 MFC set to  0.000000
11/6/2011	3:31:24 PM	PHl3 MFC set to  0.000000
11/6/2011	3:31:24 PM	SiCl4 MFC set to  0.000000
11/6/2011	3:31:24 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	3:31:24 PM	Tube furnace set to 0
11/6/2011	3:31:26 PM	Run aborted at 3:31 PM
11/6/2011	3:31:26 PM	Helium valve closed
11/6/2011	3:31:26 PM	H2 valve closed
11/6/2011	3:31:26 PM	BCl3 valve closed
11/6/2011	3:31:26 PM	PH3 valve closed
11/6/2011	3:31:26 PM	SiCl4 pre valve closed
11/6/2011	3:31:26 PM	SiCl4 post valve closed
11/6/2011	3:31:26 PM	Bypass valve closed
11/6/2011	3:31:26 PM	Main Vac valve closed
11/6/2011	3:31:26 PM	Bubbler valve closed
11/6/2011	3:31:26 PM	Helium MFC set to  0.000000
11/6/2011	3:31:26 PM	H2 MFC set to  0.000000
11/6/2011	3:31:26 PM	BCl3 MFC set to  0.000000
11/6/2011	3:31:26 PM	PHl3 MFC set to  0.000000
11/6/2011	3:31:26 PM	SiCl4 MFC set to  0.000000
11/6/2011	3:31:26 PM	Tube furnace set to 0
11/6/2011	3:34:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	3:34:44 PM	Recipe started at 3:34 PM
11/6/2011	3:34:44 PM	Helium valve closed
11/6/2011	3:34:44 PM	H2 valve closed
11/6/2011	3:34:44 PM	BCl3 valve closed
11/6/2011	3:34:44 PM	PH3 valve closed
11/6/2011	3:34:44 PM	SiCl4 pre valve closed
11/6/2011	3:34:44 PM	SiCl4 post valve closed
11/6/2011	3:34:44 PM	Main Vac valve closed
11/6/2011	3:34:44 PM	Bubbler valve closed
11/6/2011	3:34:44 PM	Bypass valve opened
11/6/2011	3:34:44 PM	Helium MFC set to  0.000000
11/6/2011	3:34:44 PM	H2 MFC set to  0.000000
11/6/2011	3:34:44 PM	BCl3 MFC set to  0.000000
11/6/2011	3:34:44 PM	PHl3 MFC set to  0.000000
11/6/2011	3:34:44 PM	SiCl4 MFC set to  0.000000
11/6/2011	3:34:44 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	3:34:44 PM	Tube furnace set to 0
11/6/2011	3:35:54 PM	Helium valve closed
11/6/2011	3:35:54 PM	H2 valve closed
11/6/2011	3:35:54 PM	BCl3 valve closed
11/6/2011	3:35:54 PM	PH3 valve closed
11/6/2011	3:35:54 PM	SiCl4 pre valve closed
11/6/2011	3:35:54 PM	SiCl4 post valve closed
11/6/2011	3:35:54 PM	Main Vac valve closed
11/6/2011	3:35:54 PM	Bubbler valve closed
11/6/2011	3:35:54 PM	Bypass valve opened
11/6/2011	3:35:54 PM	Helium MFC set to  0.000000
11/6/2011	3:35:54 PM	H2 MFC set to  0.000000
11/6/2011	3:35:54 PM	BCl3 MFC set to  0.000000
11/6/2011	3:35:54 PM	PHl3 MFC set to  0.000000
11/6/2011	3:35:54 PM	SiCl4 MFC set to  0.000000
11/6/2011	3:35:54 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	3:35:54 PM	Tube furnace set to 0
11/6/2011	3:36:54 PM	Helium valve closed
11/6/2011	3:36:54 PM	H2 valve closed
11/6/2011	3:36:54 PM	BCl3 valve closed
11/6/2011	3:36:54 PM	PH3 valve closed
11/6/2011	3:36:54 PM	SiCl4 pre valve closed
11/6/2011	3:36:54 PM	SiCl4 post valve closed
11/6/2011	3:36:54 PM	Bypass valve closed
11/6/2011	3:36:54 PM	Bubbler valve closed
11/6/2011	3:36:54 PM	Main Vac valve opened
11/6/2011	3:36:54 PM	Helium MFC set to  0.000000
11/6/2011	3:36:54 PM	H2 MFC set to  0.000000
11/6/2011	3:36:54 PM	BCl3 MFC set to  0.000000
11/6/2011	3:36:54 PM	PHl3 MFC set to  0.000000
11/6/2011	3:36:54 PM	SiCl4 MFC set to  0.000000
11/6/2011	3:36:54 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	3:36:55 PM	Tube furnace set to 0
11/6/2011	3:36:56 PM	Run finished at 3:36 PM
11/6/2011	3:36:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	5:52:00 PM	Main Vac valve closed
11/6/2011	5:52:23 PM	Main Vac valve opened
11/6/2011	5:53:53 PM	Recipe started at 5:53 PM
11/6/2011	5:53:53 PM	Helium valve closed
11/6/2011	5:53:53 PM	H2 valve closed
11/6/2011	5:53:53 PM	BCl3 valve closed
11/6/2011	5:53:53 PM	PH3 valve closed
11/6/2011	5:53:53 PM	SiCl4 pre valve closed
11/6/2011	5:53:53 PM	SiCl4 post valve closed
11/6/2011	5:53:53 PM	Main Vac valve closed
11/6/2011	5:53:53 PM	Bypass valve closed
11/6/2011	5:53:53 PM	Bubbler valve closed
11/6/2011	5:53:53 PM	Helium MFC set to  0.000000
11/6/2011	5:53:53 PM	H2 MFC set to  0.000000
11/6/2011	5:53:53 PM	BCl3 MFC set to  0.000000
11/6/2011	5:53:53 PM	PHl3 MFC set to  0.000000
11/6/2011	5:53:53 PM	SiCl4 MFC set to  0.000000
11/6/2011	5:53:53 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	5:53:53 PM	Tube furnace set to 0
11/6/2011	5:53:56 PM	Helium valve closed
11/6/2011	5:53:56 PM	BCl3 valve closed
11/6/2011	5:53:56 PM	PH3 valve closed
11/6/2011	5:53:56 PM	SiCl4 pre valve closed
11/6/2011	5:53:56 PM	SiCl4 post valve closed
11/6/2011	5:53:56 PM	Main Vac valve closed
11/6/2011	5:53:56 PM	Bypass valve closed
11/6/2011	5:53:56 PM	Bubbler valve closed
11/6/2011	5:53:56 PM	H2 valve opened
11/6/2011	5:53:56 PM	Helium MFC set to  0.000000
11/6/2011	5:53:56 PM	H2 MFC set to  500.000000
11/6/2011	5:53:56 PM	BCl3 MFC set to  0.000000
11/6/2011	5:53:56 PM	PHl3 MFC set to  0.000000
11/6/2011	5:53:56 PM	SiCl4 MFC set to  0.000000
11/6/2011	5:53:56 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	5:53:56 PM	Tube furnace set to 100
11/6/2011	5:55:03 PM	Helium valve closed
11/6/2011	5:55:03 PM	BCl3 valve closed
11/6/2011	5:55:03 PM	PH3 valve closed
11/6/2011	5:55:03 PM	SiCl4 pre valve closed
11/6/2011	5:55:03 PM	SiCl4 post valve closed
11/6/2011	5:55:03 PM	Main Vac valve closed
11/6/2011	5:55:03 PM	Bypass valve closed
11/6/2011	5:55:03 PM	H2 valve opened
11/6/2011	5:55:03 PM	Bubbler valve opened
11/6/2011	5:55:03 PM	Helium MFC set to  0.000000
11/6/2011	5:55:03 PM	H2 MFC set to  500.000000
11/6/2011	5:55:03 PM	BCl3 MFC set to  0.000000
11/6/2011	5:55:03 PM	PHl3 MFC set to  0.000000
11/6/2011	5:55:03 PM	SiCl4 MFC set to  0.000000
11/6/2011	5:55:03 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	5:55:03 PM	Tube furnace set to 1005
11/6/2011	5:55:04 PM	Helium valve closed
11/6/2011	5:55:04 PM	BCl3 valve closed
11/6/2011	5:55:04 PM	PH3 valve closed
11/6/2011	5:55:04 PM	SiCl4 pre valve closed
11/6/2011	5:55:04 PM	SiCl4 post valve closed
11/6/2011	5:55:04 PM	Main Vac valve closed
11/6/2011	5:55:04 PM	Bypass valve closed
11/6/2011	5:55:04 PM	H2 valve opened
11/6/2011	5:55:04 PM	Bubbler valve opened
11/6/2011	5:55:04 PM	Helium MFC set to  0.000000
11/6/2011	5:55:04 PM	H2 MFC set to  450.000000
11/6/2011	5:55:04 PM	BCl3 MFC set to  0.000000
11/6/2011	5:55:04 PM	PHl3 MFC set to  0.000000
11/6/2011	5:55:04 PM	SiCl4 MFC set to  0.000000
11/6/2011	5:55:04 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	5:55:04 PM	Tube furnace set to 1005
11/6/2011	6:19:04 PM	Helium valve closed
11/6/2011	6:19:04 PM	PH3 valve closed
11/6/2011	6:19:04 PM	Main Vac valve closed
11/6/2011	6:19:04 PM	Bypass valve closed
11/6/2011	6:19:04 PM	H2 valve opened
11/6/2011	6:19:04 PM	BCl3 valve opened
11/6/2011	6:19:04 PM	SiCl4 pre valve opened
11/6/2011	6:19:04 PM	SiCl4 post valve opened
11/6/2011	6:19:04 PM	Bubbler valve opened
11/6/2011	6:19:04 PM	Helium MFC set to  0.000000
11/6/2011	6:19:04 PM	H2 MFC set to  498.000000
11/6/2011	6:19:04 PM	BCl3 MFC set to  2.000000
11/6/2011	6:19:04 PM	PHl3 MFC set to  0.000000
11/6/2011	6:19:04 PM	SiCl4 MFC set to  22.000000
11/6/2011	6:19:04 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	6:19:04 PM	Tube furnace set to 1005
11/6/2011	6:39:04 PM	Helium valve closed
11/6/2011	6:39:04 PM	BCl3 valve closed
11/6/2011	6:39:04 PM	PH3 valve closed
11/6/2011	6:39:04 PM	SiCl4 pre valve closed
11/6/2011	6:39:04 PM	SiCl4 post valve closed
11/6/2011	6:39:04 PM	Main Vac valve closed
11/6/2011	6:39:04 PM	Bypass valve closed
11/6/2011	6:39:04 PM	H2 valve opened
11/6/2011	6:39:04 PM	Bubbler valve opened
11/6/2011	6:39:04 PM	Helium MFC set to  0.000000
11/6/2011	6:39:04 PM	H2 MFC set to  450.000000
11/6/2011	6:39:04 PM	BCl3 MFC set to  0.000000
11/6/2011	6:39:04 PM	PHl3 MFC set to  0.000000
11/6/2011	6:39:04 PM	SiCl4 MFC set to  0.000000
11/6/2011	6:39:04 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	6:39:05 PM	Tube furnace set to 1005
11/6/2011	6:49:05 PM	H2 valve closed
11/6/2011	6:49:05 PM	BCl3 valve closed
11/6/2011	6:49:05 PM	PH3 valve closed
11/6/2011	6:49:05 PM	SiCl4 pre valve closed
11/6/2011	6:49:05 PM	SiCl4 post valve closed
11/6/2011	6:49:05 PM	Main Vac valve closed
11/6/2011	6:49:05 PM	Bypass valve closed
11/6/2011	6:49:05 PM	Helium valve opened
11/6/2011	6:49:05 PM	Bubbler valve opened
11/6/2011	6:49:05 PM	Helium MFC set to  400.000000
11/6/2011	6:49:05 PM	H2 MFC set to  0.000000
11/6/2011	6:49:05 PM	BCl3 MFC set to  0.000000
11/6/2011	6:49:05 PM	PHl3 MFC set to  0.000000
11/6/2011	6:49:05 PM	SiCl4 MFC set to  0.000000
11/6/2011	6:49:05 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	6:49:05 PM	Tube furnace set to 0
11/6/2011	7:19:05 PM	Helium valve closed
11/6/2011	7:19:05 PM	H2 valve closed
11/6/2011	7:19:05 PM	BCl3 valve closed
11/6/2011	7:19:05 PM	PH3 valve closed
11/6/2011	7:19:05 PM	SiCl4 pre valve closed
11/6/2011	7:19:05 PM	SiCl4 post valve closed
11/6/2011	7:19:05 PM	Main Vac valve closed
11/6/2011	7:19:05 PM	Bypass valve closed
11/6/2011	7:19:05 PM	Bubbler valve closed
11/6/2011	7:19:05 PM	Helium MFC set to  0.000000
11/6/2011	7:19:05 PM	H2 MFC set to  0.000000
11/6/2011	7:19:05 PM	BCl3 MFC set to  0.000000
11/6/2011	7:19:05 PM	PHl3 MFC set to  0.000000
11/6/2011	7:19:05 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:19:05 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:19:05 PM	Tube furnace set to 0
11/6/2011	7:24:05 PM	Helium valve closed
11/6/2011	7:24:05 PM	H2 valve closed
11/6/2011	7:24:05 PM	BCl3 valve closed
11/6/2011	7:24:05 PM	PH3 valve closed
11/6/2011	7:24:05 PM	SiCl4 pre valve closed
11/6/2011	7:24:05 PM	SiCl4 post valve closed
11/6/2011	7:24:05 PM	Main Vac valve closed
11/6/2011	7:24:05 PM	Bubbler valve closed
11/6/2011	7:24:05 PM	Bypass valve opened
11/6/2011	7:24:05 PM	Helium MFC set to  0.000000
11/6/2011	7:24:05 PM	H2 MFC set to  0.000000
11/6/2011	7:24:05 PM	BCl3 MFC set to  0.000000
11/6/2011	7:24:05 PM	PHl3 MFC set to  0.000000
11/6/2011	7:24:05 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:24:05 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:24:05 PM	Tube furnace set to 0
11/6/2011	7:26:05 PM	Helium valve closed
11/6/2011	7:26:05 PM	H2 valve closed
11/6/2011	7:26:05 PM	BCl3 valve closed
11/6/2011	7:26:05 PM	PH3 valve closed
11/6/2011	7:26:05 PM	SiCl4 pre valve closed
11/6/2011	7:26:05 PM	SiCl4 post valve closed
11/6/2011	7:26:05 PM	Main Vac valve closed
11/6/2011	7:26:05 PM	Bypass valve closed
11/6/2011	7:26:05 PM	Bubbler valve closed
11/6/2011	7:26:05 PM	Helium MFC set to  0.000000
11/6/2011	7:26:05 PM	H2 MFC set to  0.000000
11/6/2011	7:26:05 PM	BCl3 MFC set to  0.000000
11/6/2011	7:26:05 PM	PHl3 MFC set to  0.000000
11/6/2011	7:26:05 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:26:05 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:26:05 PM	Tube furnace set to 0
11/6/2011	7:26:06 PM	Run finished at 7:26 PM
11/6/2011	7:36:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	7:36:57 PM	Recipe started at 7:36 PM
11/6/2011	7:36:57 PM	Helium valve closed
11/6/2011	7:36:57 PM	H2 valve closed
11/6/2011	7:36:57 PM	BCl3 valve closed
11/6/2011	7:36:57 PM	PH3 valve closed
11/6/2011	7:36:57 PM	SiCl4 pre valve closed
11/6/2011	7:36:57 PM	SiCl4 post valve closed
11/6/2011	7:36:57 PM	Main Vac valve closed
11/6/2011	7:36:57 PM	Bypass valve closed
11/6/2011	7:36:57 PM	Bubbler valve closed
11/6/2011	7:36:57 PM	Helium MFC set to  0.000000
11/6/2011	7:36:57 PM	H2 MFC set to  0.000000
11/6/2011	7:36:57 PM	BCl3 MFC set to  0.000000
11/6/2011	7:36:57 PM	PHl3 MFC set to  0.000000
11/6/2011	7:36:57 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:36:57 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:36:57 PM	Tube furnace set to 0
11/6/2011	7:37:00 PM	H2 valve closed
11/6/2011	7:37:00 PM	BCl3 valve closed
11/6/2011	7:37:00 PM	PH3 valve closed
11/6/2011	7:37:00 PM	SiCl4 pre valve closed
11/6/2011	7:37:00 PM	SiCl4 post valve closed
11/6/2011	7:37:00 PM	Main Vac valve closed
11/6/2011	7:37:00 PM	Bypass valve closed
11/6/2011	7:37:00 PM	Bubbler valve closed
11/6/2011	7:37:00 PM	Helium valve opened
11/6/2011	7:37:00 PM	Helium MFC set to  500.000000
11/6/2011	7:37:00 PM	H2 MFC set to  0.000000
11/6/2011	7:37:00 PM	BCl3 MFC set to  0.000000
11/6/2011	7:37:00 PM	PHl3 MFC set to  0.000000
11/6/2011	7:37:00 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:37:00 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:37:00 PM	Tube furnace set to 0
11/6/2011	7:38:03 PM	Helium valve closed
11/6/2011	7:38:03 PM	H2 valve closed
11/6/2011	7:38:03 PM	BCl3 valve closed
11/6/2011	7:38:03 PM	PH3 valve closed
11/6/2011	7:38:03 PM	SiCl4 pre valve closed
11/6/2011	7:38:03 PM	SiCl4 post valve closed
11/6/2011	7:38:03 PM	Main Vac valve closed
11/6/2011	7:38:03 PM	Bypass valve closed
11/6/2011	7:38:03 PM	Bubbler valve closed
11/6/2011	7:38:03 PM	Helium MFC set to  0.000000
11/6/2011	7:38:03 PM	H2 MFC set to  0.000000
11/6/2011	7:38:03 PM	BCl3 MFC set to  0.000000
11/6/2011	7:38:03 PM	PHl3 MFC set to  0.000000
11/6/2011	7:38:03 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:38:03 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:38:03 PM	Tube furnace set to 0
11/6/2011	7:38:04 PM	Run finished at 7:38 PM
11/6/2011	7:38:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/6/2011	7:40:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	7:40:39 PM	Recipe started at 7:40 PM
11/6/2011	7:40:39 PM	Helium valve closed
11/6/2011	7:40:39 PM	H2 valve closed
11/6/2011	7:40:39 PM	BCl3 valve closed
11/6/2011	7:40:39 PM	PH3 valve closed
11/6/2011	7:40:39 PM	SiCl4 pre valve closed
11/6/2011	7:40:39 PM	SiCl4 post valve closed
11/6/2011	7:40:39 PM	Main Vac valve closed
11/6/2011	7:40:39 PM	Bubbler valve closed
11/6/2011	7:40:39 PM	Bypass valve opened
11/6/2011	7:40:39 PM	Helium MFC set to  0.000000
11/6/2011	7:40:39 PM	H2 MFC set to  0.000000
11/6/2011	7:40:39 PM	BCl3 MFC set to  0.000000
11/6/2011	7:40:39 PM	PHl3 MFC set to  0.000000
11/6/2011	7:40:39 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:40:39 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:40:40 PM	Tube furnace set to 0
11/6/2011	7:41:45 PM	Helium valve closed
11/6/2011	7:41:45 PM	H2 valve closed
11/6/2011	7:41:45 PM	BCl3 valve closed
11/6/2011	7:41:45 PM	PH3 valve closed
11/6/2011	7:41:45 PM	SiCl4 pre valve closed
11/6/2011	7:41:45 PM	SiCl4 post valve closed
11/6/2011	7:41:45 PM	Main Vac valve closed
11/6/2011	7:41:45 PM	Bubbler valve closed
11/6/2011	7:41:45 PM	Bypass valve opened
11/6/2011	7:41:45 PM	Helium MFC set to  0.000000
11/6/2011	7:41:45 PM	H2 MFC set to  0.000000
11/6/2011	7:41:45 PM	BCl3 MFC set to  0.000000
11/6/2011	7:41:45 PM	PHl3 MFC set to  0.000000
11/6/2011	7:41:45 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:41:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:41:45 PM	Tube furnace set to 0
11/6/2011	7:42:45 PM	Helium valve closed
11/6/2011	7:42:45 PM	H2 valve closed
11/6/2011	7:42:45 PM	BCl3 valve closed
11/6/2011	7:42:45 PM	PH3 valve closed
11/6/2011	7:42:45 PM	SiCl4 pre valve closed
11/6/2011	7:42:45 PM	SiCl4 post valve closed
11/6/2011	7:42:45 PM	Bypass valve closed
11/6/2011	7:42:45 PM	Bubbler valve closed
11/6/2011	7:42:45 PM	Main Vac valve opened
11/6/2011	7:42:45 PM	Helium MFC set to  0.000000
11/6/2011	7:42:45 PM	H2 MFC set to  0.000000
11/6/2011	7:42:45 PM	BCl3 MFC set to  0.000000
11/6/2011	7:42:45 PM	PHl3 MFC set to  0.000000
11/6/2011	7:42:45 PM	SiCl4 MFC set to  0.000000
11/6/2011	7:42:45 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	7:42:45 PM	Tube furnace set to 0
11/6/2011	7:42:46 PM	Run finished at 7:42 PM
11/6/2011	7:42:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	8:33:28 PM	Main Vac valve closed
11/6/2011	8:34:19 PM	Main Vac valve opened
11/6/2011	8:34:56 PM	Tube furnace set to 50
11/6/2011	8:45:38 PM	Recipe started at 8:45 PM
11/6/2011	8:45:38 PM	Helium valve closed
11/6/2011	8:45:38 PM	H2 valve closed
11/6/2011	8:45:38 PM	BCl3 valve closed
11/6/2011	8:45:38 PM	PH3 valve closed
11/6/2011	8:45:38 PM	SiCl4 pre valve closed
11/6/2011	8:45:38 PM	SiCl4 post valve closed
11/6/2011	8:45:38 PM	Main Vac valve closed
11/6/2011	8:45:38 PM	Bypass valve closed
11/6/2011	8:45:38 PM	Bubbler valve closed
11/6/2011	8:45:38 PM	Helium MFC set to  0.000000
11/6/2011	8:45:38 PM	H2 MFC set to  0.000000
11/6/2011	8:45:38 PM	BCl3 MFC set to  0.000000
11/6/2011	8:45:38 PM	PHl3 MFC set to  0.000000
11/6/2011	8:45:38 PM	SiCl4 MFC set to  0.000000
11/6/2011	8:45:38 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:45:38 PM	Tube furnace set to 0
11/6/2011	8:45:41 PM	Helium valve closed
11/6/2011	8:45:41 PM	BCl3 valve closed
11/6/2011	8:45:41 PM	PH3 valve closed
11/6/2011	8:45:41 PM	SiCl4 pre valve closed
11/6/2011	8:45:41 PM	SiCl4 post valve closed
11/6/2011	8:45:41 PM	Main Vac valve closed
11/6/2011	8:45:41 PM	Bypass valve closed
11/6/2011	8:45:41 PM	Bubbler valve closed
11/6/2011	8:45:41 PM	H2 valve opened
11/6/2011	8:45:41 PM	Helium MFC set to  0.000000
11/6/2011	8:45:41 PM	H2 MFC set to  500.000000
11/6/2011	8:45:41 PM	BCl3 MFC set to  0.000000
11/6/2011	8:45:41 PM	PHl3 MFC set to  0.000000
11/6/2011	8:45:41 PM	SiCl4 MFC set to  0.000000
11/6/2011	8:45:41 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:45:41 PM	Tube furnace set to 100
11/6/2011	8:46:47 PM	Helium valve closed
11/6/2011	8:46:47 PM	BCl3 valve closed
11/6/2011	8:46:47 PM	PH3 valve closed
11/6/2011	8:46:47 PM	SiCl4 pre valve closed
11/6/2011	8:46:47 PM	SiCl4 post valve closed
11/6/2011	8:46:47 PM	Main Vac valve closed
11/6/2011	8:46:47 PM	Bypass valve closed
11/6/2011	8:46:47 PM	H2 valve opened
11/6/2011	8:46:47 PM	Bubbler valve opened
11/6/2011	8:46:47 PM	Helium MFC set to  0.000000
11/6/2011	8:46:47 PM	H2 MFC set to  500.000000
11/6/2011	8:46:47 PM	BCl3 MFC set to  0.000000
11/6/2011	8:46:47 PM	PHl3 MFC set to  0.000000
11/6/2011	8:46:47 PM	SiCl4 MFC set to  0.000000
11/6/2011	8:46:47 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:46:47 PM	Tube furnace set to 1005
11/6/2011	8:46:48 PM	Helium valve closed
11/6/2011	8:46:48 PM	BCl3 valve closed
11/6/2011	8:46:48 PM	PH3 valve closed
11/6/2011	8:46:48 PM	SiCl4 pre valve closed
11/6/2011	8:46:48 PM	SiCl4 post valve closed
11/6/2011	8:46:48 PM	Main Vac valve closed
11/6/2011	8:46:48 PM	Bypass valve closed
11/6/2011	8:46:48 PM	H2 valve opened
11/6/2011	8:46:48 PM	Bubbler valve opened
11/6/2011	8:46:48 PM	Helium MFC set to  0.000000
11/6/2011	8:46:48 PM	H2 MFC set to  450.000000
11/6/2011	8:46:48 PM	BCl3 MFC set to  0.000000
11/6/2011	8:46:48 PM	PHl3 MFC set to  0.000000
11/6/2011	8:46:48 PM	SiCl4 MFC set to  0.000000
11/6/2011	8:46:48 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	8:46:49 PM	Tube furnace set to 1005
11/6/2011	9:10:49 PM	Helium valve closed
11/6/2011	9:10:49 PM	PH3 valve closed
11/6/2011	9:10:49 PM	Main Vac valve closed
11/6/2011	9:10:49 PM	Bypass valve closed
11/6/2011	9:10:49 PM	H2 valve opened
11/6/2011	9:10:49 PM	BCl3 valve opened
11/6/2011	9:10:49 PM	SiCl4 pre valve opened
11/6/2011	9:10:49 PM	SiCl4 post valve opened
11/6/2011	9:10:49 PM	Bubbler valve opened
11/6/2011	9:10:49 PM	Helium MFC set to  0.000000
11/6/2011	9:10:49 PM	H2 MFC set to  496.000000
11/6/2011	9:10:49 PM	BCl3 MFC set to  2.000000
11/6/2011	9:10:49 PM	PHl3 MFC set to  0.000000
11/6/2011	9:10:49 PM	SiCl4 MFC set to  24.000000
11/6/2011	9:10:49 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:10:49 PM	Tube furnace set to 1005
11/6/2011	9:30:49 PM	Helium valve closed
11/6/2011	9:30:49 PM	BCl3 valve closed
11/6/2011	9:30:49 PM	PH3 valve closed
11/6/2011	9:30:49 PM	SiCl4 pre valve closed
11/6/2011	9:30:49 PM	SiCl4 post valve closed
11/6/2011	9:30:49 PM	Main Vac valve closed
11/6/2011	9:30:49 PM	Bypass valve closed
11/6/2011	9:30:49 PM	H2 valve opened
11/6/2011	9:30:49 PM	Bubbler valve opened
11/6/2011	9:30:49 PM	Helium MFC set to  0.000000
11/6/2011	9:30:49 PM	H2 MFC set to  450.000000
11/6/2011	9:30:49 PM	BCl3 MFC set to  0.000000
11/6/2011	9:30:49 PM	PHl3 MFC set to  0.000000
11/6/2011	9:30:49 PM	SiCl4 MFC set to  0.000000
11/6/2011	9:30:49 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:30:49 PM	Tube furnace set to 1005
11/6/2011	9:36:10 PM	H2 valve closed
11/6/2011	9:36:10 PM	BCl3 valve closed
11/6/2011	9:36:10 PM	PH3 valve closed
11/6/2011	9:36:10 PM	SiCl4 pre valve closed
11/6/2011	9:36:10 PM	SiCl4 post valve closed
11/6/2011	9:36:10 PM	Main Vac valve closed
11/6/2011	9:36:10 PM	Bypass valve closed
11/6/2011	9:36:10 PM	Helium valve opened
11/6/2011	9:36:10 PM	Bubbler valve opened
11/6/2011	9:36:10 PM	Helium MFC set to  400.000000
11/6/2011	9:36:10 PM	H2 MFC set to  0.000000
11/6/2011	9:36:10 PM	BCl3 MFC set to  0.000000
11/6/2011	9:36:10 PM	PHl3 MFC set to  0.000000
11/6/2011	9:36:10 PM	SiCl4 MFC set to  0.000000
11/6/2011	9:36:10 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:36:10 PM	Tube furnace set to 0
11/6/2011	9:56:22 PM	Run aborted at 9:56 PM
11/6/2011	9:56:22 PM	Helium valve closed
11/6/2011	9:56:22 PM	H2 valve closed
11/6/2011	9:56:22 PM	BCl3 valve closed
11/6/2011	9:56:22 PM	PH3 valve closed
11/6/2011	9:56:22 PM	SiCl4 pre valve closed
11/6/2011	9:56:22 PM	SiCl4 post valve closed
11/6/2011	9:56:22 PM	Bypass valve closed
11/6/2011	9:56:22 PM	Main Vac valve closed
11/6/2011	9:56:22 PM	Bubbler valve closed
11/6/2011	9:56:22 PM	Helium MFC set to  0.000000
11/6/2011	9:56:22 PM	H2 MFC set to  0.000000
11/6/2011	9:56:22 PM	BCl3 MFC set to  0.000000
11/6/2011	9:56:22 PM	PHl3 MFC set to  0.000000
11/6/2011	9:56:22 PM	SiCl4 MFC set to  0.000000
11/6/2011	9:56:22 PM	Tube furnace set to 0
11/6/2011	9:58:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/6/2011	9:58:36 PM	Recipe started at 9:58 PM
11/6/2011	9:58:36 PM	Helium valve closed
11/6/2011	9:58:36 PM	H2 valve closed
11/6/2011	9:58:36 PM	BCl3 valve closed
11/6/2011	9:58:36 PM	PH3 valve closed
11/6/2011	9:58:36 PM	SiCl4 pre valve closed
11/6/2011	9:58:36 PM	SiCl4 post valve closed
11/6/2011	9:58:36 PM	Main Vac valve closed
11/6/2011	9:58:36 PM	Bubbler valve closed
11/6/2011	9:58:36 PM	Bypass valve opened
11/6/2011	9:58:36 PM	Helium MFC set to  0.000000
11/6/2011	9:58:36 PM	H2 MFC set to  0.000000
11/6/2011	9:58:36 PM	BCl3 MFC set to  0.000000
11/6/2011	9:58:36 PM	PHl3 MFC set to  0.000000
11/6/2011	9:58:36 PM	SiCl4 MFC set to  0.000000
11/6/2011	9:58:36 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:58:36 PM	Tube furnace set to 0
11/6/2011	9:59:39 PM	Helium valve closed
11/6/2011	9:59:39 PM	H2 valve closed
11/6/2011	9:59:39 PM	BCl3 valve closed
11/6/2011	9:59:39 PM	PH3 valve closed
11/6/2011	9:59:39 PM	SiCl4 pre valve closed
11/6/2011	9:59:39 PM	SiCl4 post valve closed
11/6/2011	9:59:39 PM	Main Vac valve closed
11/6/2011	9:59:39 PM	Bubbler valve closed
11/6/2011	9:59:39 PM	Bypass valve opened
11/6/2011	9:59:39 PM	Helium MFC set to  0.000000
11/6/2011	9:59:39 PM	H2 MFC set to  0.000000
11/6/2011	9:59:39 PM	BCl3 MFC set to  0.000000
11/6/2011	9:59:39 PM	PHl3 MFC set to  0.000000
11/6/2011	9:59:39 PM	SiCl4 MFC set to  0.000000
11/6/2011	9:59:39 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	9:59:39 PM	Tube furnace set to 0
11/6/2011	10:00:39 PM	Helium valve closed
11/6/2011	10:00:39 PM	H2 valve closed
11/6/2011	10:00:39 PM	BCl3 valve closed
11/6/2011	10:00:39 PM	PH3 valve closed
11/6/2011	10:00:39 PM	SiCl4 pre valve closed
11/6/2011	10:00:39 PM	SiCl4 post valve closed
11/6/2011	10:00:39 PM	Bypass valve closed
11/6/2011	10:00:39 PM	Bubbler valve closed
11/6/2011	10:00:39 PM	Main Vac valve opened
11/6/2011	10:00:39 PM	Helium MFC set to  0.000000
11/6/2011	10:00:39 PM	H2 MFC set to  0.000000
11/6/2011	10:00:39 PM	BCl3 MFC set to  0.000000
11/6/2011	10:00:39 PM	PHl3 MFC set to  0.000000
11/6/2011	10:00:39 PM	SiCl4 MFC set to  0.000000
11/6/2011	10:00:39 PM	Bypass solenoid MFC set to  0.000000
11/6/2011	10:00:39 PM	Tube furnace set to 0
11/6/2011	10:00:40 PM	Run finished at 10:00 PM
11/6/2011	10:00:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
